CARBON FIBER END EFFECTOR DATA SHEET

OUR CODE _______________________________________________________ORIGINAL PART P/N

C15-KLT608-1V _________________________________________________________ NOT AVAILABLE

RELEASE DATE May. 2002__________________________________________RELEASE NUMBER 1.0

EQUIPMENT MANUFACTURER_____________________________________ EQUIPMENT TYPE

KLA_______________________________________________________________2608 SURFACE SCANNER

APPLICATION DESCRIPTION

This is a fork shaped, carbon end effector with a double layered reinforcement in the first section. It is made by a single layer of 1.5 mm carbon laminate, and replaces a ceramic original part.

The double layer reinforcement is needed to respect the original geometry, since part dimensions gives enough stiffness to the part also in case of single layer.

Basically our part is more durable than the fragile original, and the teflon pad contact give less scratches to wafer surface.

PICTURE